Technical Information: Current Status of Vacuum Ultraviolet Excimer Lamps and Their Industrial Applications
It is possible to break molecular bonds through non-thermal processes! Introducing applications in the semiconductor-related field.
This document introduces the current status of "vacuum ultraviolet excimer lamps" and their industrial applications. Excimer refers to a dimer formed by one atom or molecule in an excited state and one atom or molecule in a ground state. "Vacuum ultraviolet excimer lamps" have features such as the ability to emit quasi-monochromatic light and short wavelengths not found in general lamps, as well as the capability for instant lighting and flashing. Additionally, vacuum ultraviolet light has a short wavelength and high photon energy, allowing it to break molecular bonds through non-thermal processes. [Contents] ■ What are vacuum ultraviolet excimer lamps? ■ Applications of vacuum ultraviolet excimer lamps *For more details, please refer to the PDF document or feel free to contact us.
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